검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Carbon contamination of EUV mask and its effect on CD performance Lee S, Doh JG, Lee JU, Lee I, Jeong CY, Lee DG, Rah SY, Ahn J Current Applied Physics, 11(4), S107, 2011 |
| 2 |
Curved beam coherent diffractive imaging Williams GJ, Quiney HM, Dahl BB, Tran CQ, Peele AG, Nugent KA, De Jonge MD, Paterson D Thin Solid Films, 515(14), 5553, 2007 |
| 3 |
Analysis of phase separation in compressible polymer blends and block copolymers Cho JH Macromolecules, 33(6), 2228, 2000 |