검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Measurement of Young's modulus and residual stress of copper film electroplated on silicon wafer Zhou Y, Yang CS, Chen JA, Ding GF, Ding W, Wang L, Wang MJ, Zhang YM, Zhang TH Thin Solid Films, 460(1-2), 175, 2004 |
| No. | Article |
|---|---|
| 1 |
Measurement of Young's modulus and residual stress of copper film electroplated on silicon wafer Zhou Y, Yang CS, Chen JA, Ding GF, Ding W, Wang L, Wang MJ, Zhang YM, Zhang TH Thin Solid Films, 460(1-2), 175, 2004 |