화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Evaluation of an empirical model to estimate and optimize mechanical properties of PECVD SiC films
Pham HTM, de Boer CR, Visser CCCG, Sarro PM
Journal of the Electrochemical Society, 152(11), G889, 2005
2 Fabrication of a glass-implemented microcapillary electrophoresis device with integrated contactless conductivity detection
Berthold A, Laugere F, Schellevis H, de Boer CR, Laros M, Guijt RM, Sarro PM, Vellekoop MJ
Electrophoresis, 23(20), 3511, 2002
3 Influence of deposition parameters and temperature on stress and strain of in situ doped PECVD silicon carbide
Pham HTM, de Boer CR, Pakula L, Sarro PM
Materials Science Forum, 389-3, 759, 2002
4 Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films
Pham HTM, Akkaya T, de Boer CR, Sarro PM
Materials Science Forum, 433-4, 451, 2002