검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hot-wire chemical vapor deposition of high hydrogen content silicon nitride for solar cell passivation and anti-reflection coating applications Holt JK, Goodwin DG, Gabor AM, Jiang F, Stavola M, Atwater HA Thin Solid Films, 430(1-2), 37, 2003 |