검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth of tantalum boron nitride films on Si by radio frequency reactive sputtering: effect of N-2/Ar flow ratio Lin ST, Lee C Materials Chemistry and Physics, 82(3), 691, 2003 |
| No. | Article |
|---|---|
| 1 |
Growth of tantalum boron nitride films on Si by radio frequency reactive sputtering: effect of N-2/Ar flow ratio Lin ST, Lee C Materials Chemistry and Physics, 82(3), 691, 2003 |