검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of precursors for pulsed metal-organic chemical vapor deposition of HFO2 high-K dielectric thin films Teren AR, Thomas R, He JQ, Ehrhart P Thin Solid Films, 478(1-2), 206, 2005 |
| No. | Article |
|---|---|
| 1 |
Comparison of precursors for pulsed metal-organic chemical vapor deposition of HFO2 high-K dielectric thin films Teren AR, Thomas R, He JQ, Ehrhart P Thin Solid Films, 478(1-2), 206, 2005 |