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| No. | Article |
|---|---|
| 1 |
Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics Lazzeri P, Oehrlein GS, Stueber GJ, McGowan R, Busch E, Pederzoli S, Jeynes C, Bersani M, Anderle M Thin Solid Films, 516(11), 3697, 2008 |