검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Anisotropic high-k deposition for gate-last processing of metal-oxide-semiconductor field-effect transistor utilizing electron-cyclotron-resonance plasma sputtering Kikuchi Y, Gao J, Sano T, Ohmi S Thin Solid Films, 520(7), 2989, 2012 |
| 2 |
Characterization of all-solid-state secondary batteries with LiCoO2 thin films prepared by ECR sputtering as positive electrodes Takahashi M, Hayashi M, Shodai T Journal of Power Sources, 189(1), 191, 2009 |
| 3 |
Comparative study of (Ba,Sr)TiO3 films prepared by electron cyclotron resonance plasma sputtering and metal-organic decomposition Matsumoto T, Niino A, Numata K, Saito H, Miyake S Thin Solid Films, 476(1), 73, 2005 |
| 4 |
Preparation of strontium titanate thin firms by mirror-confinement-type electron cyclotron resonance plasma sputtering Baba S, Numata K, Saito H, Kumagai M, Ueno T, Kyoh B, Miyake S Thin Solid Films, 390(1-2), 70, 2001 |