검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Strain relaxation of epitaxial CoSi2 and SiGe layers in cap-Si/Si0.83Ge0.17/Si(001) and epi-CoSi2/Si0.83Ge0.17/Si(001) structures Shin DO, Sardela MR, Ban SH, Lee NE, Shim KH Applied Surface Science, 237(1-4), 139, 2004 |
| 2 |
Structural and electrical characteristics of epitaxial CoSi2 grown on n-Si0.83Ge0.17/n-Si(001) by reactive chemical vapor deposition using a Si capping layer Shin DO, Ban SH, Ahn YS, Lee YS, Lee NE, Shim KH Thin Solid Films, 458(1-2), 269, 2004 |