검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing Kleineberg U, Westerwalbesloh T, Hachmann W, Heinzmann U, Tummler J, Scholze F, Ulm G, Mullender S Thin Solid Films, 433(1-2), 230, 2003 |