검색결과 : 3건
No. | Article |
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1 |
Comparison of various low dielectric constant materials Cheng YL, Lee CY, Hung WJ, Chen GS, Fang JS Thin Solid Films, 660, 871, 2018 |
2 |
Enhanced performance and reliability of NILC-TFTs using FSG buffer layer Chen CC, Wu YS, Chang CP Materials Chemistry and Physics, 132(2-3), 637, 2012 |
3 |
The comparative study of thermal stability among silicon dioxide, fluorinated silicate glass, hydrogen silsesquioxane, and organosilicate glass dielectrics on silicon Jeng JS, Chen JS Thin Solid Films, 516(18), 6013, 2008 |