화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Comparison of various low dielectric constant materials
Cheng YL, Lee CY, Hung WJ, Chen GS, Fang JS
Thin Solid Films, 660, 871, 2018
2 Enhanced performance and reliability of NILC-TFTs using FSG buffer layer
Chen CC, Wu YS, Chang CP
Materials Chemistry and Physics, 132(2-3), 637, 2012
3 The comparative study of thermal stability among silicon dioxide, fluorinated silicate glass, hydrogen silsesquioxane, and organosilicate glass dielectrics on silicon
Jeng JS, Chen JS
Thin Solid Films, 516(18), 6013, 2008