검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A heating and diffusion barrier based on TaSiNx for miniaturized IC devices Cheng HY, Chen YC, Lee CM, Wang SH, Chin TS Thin Solid Films, 515(3), 990, 2006 |
| No. | Article |
|---|---|
| 1 |
A heating and diffusion barrier based on TaSiNx for miniaturized IC devices Cheng HY, Chen YC, Lee CM, Wang SH, Chin TS Thin Solid Films, 515(3), 990, 2006 |