검색결과 : 1건
No. | Article |
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1 |
Gaseous etching of 6H-SiC at relatively low temperatures Xie ZY, Wei CH, Li LY, Yu QM, Edgar JH Journal of Crystal Growth, 217(1-2), 115, 2000 |
No. | Article |
---|---|
1 |
Gaseous etching of 6H-SiC at relatively low temperatures Xie ZY, Wei CH, Li LY, Yu QM, Edgar JH Journal of Crystal Growth, 217(1-2), 115, 2000 |