검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth control of a silicon structure fabricated by 100q keV Ar ion beam lithography Kawasegi N, Morita N, Yamada S, Takano N, Oyama T, Momota S, Taniguchi J, Miyamoto I Applied Surface Science, 253(6), 3284, 2007 |
| No. | Article |
|---|---|
| 1 |
Depth control of a silicon structure fabricated by 100q keV Ar ion beam lithography Kawasegi N, Morita N, Yamada S, Takano N, Oyama T, Momota S, Taniguchi J, Miyamoto I Applied Surface Science, 253(6), 3284, 2007 |