검색결과 : 1건
No. | Article |
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1 |
Monitoring of crystallization and the effect of the deposition rate, hydrogen content and annealing process on the crystallization of hot wire chemical vapor deposited hydrogenated amorphous silicon (a-Si : H) films Roy B, Mahan AH, Wang Q, Reed R, Readey DW, Ginley DS Thin Solid Films, 516(18), 6517, 2008 |