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Influence of argon ion beam etching and thermal treatment on polycrystalline and single crystal gold electrodes Au(100) and Au(111) Ahrens P, Zander M, Hirsch D, Hasse U, Wulff H, Frost F, Scholz F Journal of Electroanalytical Chemistry, 832, 233, 2019 |
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Monitoring of (reactive) ion etching (RIE) with reflectance anisotropy spectroscopy (RAS) equipment Barzen L, Richter J, Fouckhardt H, Wahl M, Kopnarsk M Applied Surface Science, 328, 120, 2015 |
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Local field-emission characteristic of individual AlN cone fabricated by focused ion-beam etching method Li YL, Shi CY, Li JJ, Gu CZ Applied Surface Science, 254(15), 4840, 2008 |
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In situ endpoint detection of reactive ion-beam etching of dielectric gratings with an etch-stop layer using downstream mass spectrometry Meng XF, Li LF Applied Surface Science, 254(17), 5421, 2008 |
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Piezoelectric evaluation of ion beam etched Pb(Zr,Ti)O-3 thin films by piezoresponse force microscopy Legrand C, Da Costa A, Desfeux R, Soyer C, Remiens D Applied Surface Science, 253(11), 4942, 2007 |
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Formation of biaxial texture in metal films by selective ion beam etching Park SJ, Norton DP, Selvamanickam V Applied Surface Science, 252(14), 5197, 2006 |
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Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications Perentos A, Mitchell A, Holland A Applied Surface Science, 252(4), 1006, 2005 |
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A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy Zhu L, Liew T, Chong TC Applied Surface Science, 189(1-2), 53, 2002 |
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Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique Yu LJ, Sheeja D, Tay BK, Chua DHC, Milne WI, Miao J, Fu YQ Applied Surface Science, 195(1-4), 107, 2002 |