검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Spatial structure of plasma potential oscillation and ion saturation current in VHF multi-tile electrode plasma source Ryan K, O'Farrell D, Ellingboe AR Current Applied Physics, 11(5), S114, 2011 |
| 2 |
Large area VHF plasma production by a balanced power feeding method Nishimiya T, Takeuchi Y, Yamauchi Y, Takatsuka H, Shioya T, Muta H, Kawai Y Thin Solid Films, 516(13), 4430, 2008 |