화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Effect of oxidized Al prelayer for the growth of poly-crystalline Al2O3 films on Si using ionized beam deposition
Whangbo SW, Choi YK, Jang HK, Chung YD, Lyo IW, Whang CN
Thin Solid Films, 388(1-2), 290, 2001
2 Effect of silicon surface states on the properties of epitaxial Al2O3 films
Whangbo SW, Choi YK, Koh WS, Chung KB, Jang HK, Whang CN
Thin Solid Films, 398-399, 480, 2001
3 A self-ion assisted beam (SIAB) source based upon unvala electron beam scheme
Choi WK, Song JH, Kim KH, Lee CM, Choi SC, Song JH, Jung HJ
Thin Solid Films, 354(1-2), 29, 1999