검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The reactive neutral beam etching of SiC and its application in p-n junction periphery protection. Sarov G, Cholakova T, Kakanakov R Materials Science Forum, 483, 769, 2005 |
| No. | Article |
|---|---|
| 1 |
The reactive neutral beam etching of SiC and its application in p-n junction periphery protection. Sarov G, Cholakova T, Kakanakov R Materials Science Forum, 483, 769, 2005 |