검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Stochastic simulation of thin photoresist film dissolution: a dynamic and a quasi-static dissolution algorithm for the simulation of surface and line-edge roughness formation Patsis GP Polymer, 46(7), 2404, 2005 |
| No. | Article |
|---|---|
| 1 |
Stochastic simulation of thin photoresist film dissolution: a dynamic and a quasi-static dissolution algorithm for the simulation of surface and line-edge roughness formation Patsis GP Polymer, 46(7), 2404, 2005 |