검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of SiO2 layers for planar lightwave circuits Jung ST, Song HS, Kim DS, Kim HS Thin Solid Films, 341(1-2), 188, 1999 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of SiO2 layers for planar lightwave circuits Jung ST, Song HS, Kim DS, Kim HS Thin Solid Films, 341(1-2), 188, 1999 |