검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sputter damage in Si surface by low energy Ar+ ion bombardment Shin HC, Oh SK, Kang HJ, Lee HI, Moon DW Current Applied Physics, 3(1), 61, 2003 |
| No. | Article |
|---|---|
| 1 |
Sputter damage in Si surface by low energy Ar+ ion bombardment Shin HC, Oh SK, Kang HJ, Lee HI, Moon DW Current Applied Physics, 3(1), 61, 2003 |