검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A multiscale systems approach to microelectronic processes Braatz RD, Alkire RC, Seebauer EG, Drews TO, Rusli E, Karulkar M, Xue F, Qin Y, Jung MYL, Gunawan R Computers & Chemical Engineering, 30(10-12), 1643, 2006 |
| 2 |
Optimal control of rapid thermal annealing in a semiconductor process Gunawan R, Jung MYL, Seebauer EG, Braatz RD Journal of Process Control, 14(4), 423, 2004 |