검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characteristics of monopole antenna plasmas for TEOS PECVD Takizawa K, Mori Y, Miyatake N, Murata K Thin Solid Films, 516(11), 3605, 2008 |
| No. | Article |
|---|---|
| 1 |
Characteristics of monopole antenna plasmas for TEOS PECVD Takizawa K, Mori Y, Miyatake N, Murata K Thin Solid Films, 516(11), 3605, 2008 |