검색결과 : 2건
No. | Article |
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1 |
Removing 20 nm Particles Using a Supersonic Argon Particle Beam Generated with a Contoured Laval Nozzle Lee JW, Hwang KS, Lee KH, Yi MY, Lee MJ Journal of Adhesion Science and Technology, 23(5), 769, 2009 |
2 |
Selective removal of 10-40-nm particles from silicon wafers using laser-induced plasma shockwaves Peri MDM, Devarapalli VK, Cetinkaya C Journal of Adhesion Science and Technology, 21(3-4), 331, 2007 |