화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Removing 20 nm Particles Using a Supersonic Argon Particle Beam Generated with a Contoured Laval Nozzle
Lee JW, Hwang KS, Lee KH, Yi MY, Lee MJ
Journal of Adhesion Science and Technology, 23(5), 769, 2009
2 Selective removal of 10-40-nm particles from silicon wafers using laser-induced plasma shockwaves
Peri MDM, Devarapalli VK, Cetinkaya C
Journal of Adhesion Science and Technology, 21(3-4), 331, 2007