검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Multivariable optimal learning control of wafer temperatures in a commercial RTP equipment Cho MK, Joo SR, Won SH, Lee KS Canadian Journal of Chemical Engineering, 83(2), 371, 2005 |
| No. | Article |
|---|---|
| 1 |
Multivariable optimal learning control of wafer temperatures in a commercial RTP equipment Cho MK, Joo SR, Won SH, Lee KS Canadian Journal of Chemical Engineering, 83(2), 371, 2005 |