검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical-mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content Borst CL, Korthuis V, Shinn GB, Luttmer JD, Gutmann RJ, Gill WN Thin Solid Films, 385(1-2), 281, 2001 |
| No. | Article |
|---|---|
| 1 |
Chemical-mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content Borst CL, Korthuis V, Shinn GB, Luttmer JD, Gutmann RJ, Gill WN Thin Solid Films, 385(1-2), 281, 2001 |