검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Design and analysis of the single-step nanoimprinting lithography equipment for sub-100 nm linewidth Lee J, Choi KB, Kim GH Current Applied Physics, 6(6), 1007, 2006 |
| No. | Article |
|---|---|
| 1 |
Design and analysis of the single-step nanoimprinting lithography equipment for sub-100 nm linewidth Lee J, Choi KB, Kim GH Current Applied Physics, 6(6), 1007, 2006 |