검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate Ha SC, Choi E, Kim SH, Roh JS Thin Solid Films, 476(2), 252, 2005 |
| No. | Article |
|---|---|
| 1 |
Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate Ha SC, Choi E, Kim SH, Roh JS Thin Solid Films, 476(2), 252, 2005 |