검색결과 : 3건
No. | Article |
---|---|
1 |
Uniform COSi2 nano-nucleus formation by oxide mediated silicidation with a Ti capping layer Chang JJ, Hsieh TE, Liu CP, Wang YL Thin Solid Films, 498(1-2), 85, 2006 |
2 |
Oxide-mediated fort-nation of epitaxy silicide on heavily doped Si surfaces and narrow width active region Chen YM, Tu GC, Wang YL Thin Solid Films, 498(1-2), 90, 2006 |
3 |
Epitaxial silicide interfaces in microelectronics Tung RT, Ohmi S Thin Solid Films, 369(1-2), 233, 2000 |