화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Uniform COSi2 nano-nucleus formation by oxide mediated silicidation with a Ti capping layer
Chang JJ, Hsieh TE, Liu CP, Wang YL
Thin Solid Films, 498(1-2), 85, 2006
2 Oxide-mediated fort-nation of epitaxy silicide on heavily doped Si surfaces and narrow width active region
Chen YM, Tu GC, Wang YL
Thin Solid Films, 498(1-2), 90, 2006
3 Epitaxial silicide interfaces in microelectronics
Tung RT, Ohmi S
Thin Solid Films, 369(1-2), 233, 2000