검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Heat Treatment of Carbonized Photoresist Mask with Ammonia for Epitaxial Lateral Overgrowth of a-plane GaN on R-plane Sapphire Kim DS, Kwon JH, Jhin JG, Byun DJ Korean Journal of Materials Research, 28(4), 208, 2018 |
| 2 |
A study of GaN etching characteristics using HBr-based inductively coupled plasmas Kim DW, Jeong CH, Lee HY, Kim HS, Sung YJ, Yeom GY Solid-State Electronics, 47(3), 549, 2003 |