검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Modeling and simulation of plasma etching reactors for microelectronics Economou DJ Thin Solid Films, 365(2), 348, 2000 |
| 2 |
Modeling and Control of Microelectronics Materials Processing Badgwell TA, Breedijk T, Bushman SG, Butler SW, Chatterjee S, Edgar TF, Toprac AJ, Trachtenberg I Computers & Chemical Engineering, 19(1), 1, 1995 |