검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control Koo J, Ha D, Park D, Roh HJ, Ryu S, Kim GH, Baek KH, Han CH Computers & Chemical Engineering, 100, 38, 2017 |
| 2 |
D- density distribution and its dependence on plasma parameters in volume negative ion sources Mori S, Fukumasa O Thin Solid Films, 506, 531, 2006 |