검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF4 plasmas Ventzek PLG, Denpoh K Journal of Vacuum Science & Technology A, 27(2), 287, 2009 |
| 2 |
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled plasmas in argon Denpoh K, Ventzek PLG Journal of Vacuum Science & Technology A, 26(6), 1415, 2008 |