화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF4 plasmas
Ventzek PLG, Denpoh K
Journal of Vacuum Science & Technology A, 27(2), 287, 2009
2 Establishment of very uniform gas-flow pattern in the process chamber for microwave-excited high-density plasma by ceramic shower plate
Goto T, Inokuchi A, Ishibashi K, Yasuda S, Nakanishi T, Kohno M, Okesaku M, Sasaki M, Nozawa T, Hirayama M, Ohmi T
Journal of Vacuum Science & Technology A, 27(4), 686, 2009