검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
저진공 축전결합형 SF6, SF6/O2, SF6/CH4 플라즈마를 이용한 아크릴의 반응성 건식 식각 박연현, 주영우, 김재권, 노호섭, 이제원 Korean Journal of Materials Research, 19(2), 68, 2009 |
| 2 |
Molecular dynamics simulations for nitridation of organic polymer surfaces due to hydrogen-nitrogen ion beam injections Yamashiro M, Yamada H, Hamaguchi S Thin Solid Films, 516(11), 3449, 2008 |
| 3 |
Focused ion beam micromachining and computation of polymeric photonic band gap Pialat E, Trigaud T, Mouton JP, Thevenot M Journal of Polymer Science Part B: Polymer Physics, 45(21), 2993, 2007 |
| 4 |
다층 RIE Electrode를 이용한 아크릴의 O2/N2 플라즈마 건식 식각 김재권, 김주형, 박연현, 주영우, 백인규, 조관식, 송한정, 이제원 Korean Journal of Materials Research, 17(12), 642, 2007 |
| 5 |
High-intensity sources of incoherent UV and VUV excimer radiation for low-temperature materials processing Kogelschatz U, Esrom H, Zhang JY, Boyd IW Applied Surface Science, 168(1-4), 29, 2000 |