검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Coherent diffraction lithography: Periodic patterns via mask-based interference lithography Fucetola CP, Patel AA, Moon EE, O'Reilly TB, Smith HI Journal of Vacuum Science & Technology B, 27(6), 2947, 2009 |
| 2 |
Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography Pina-Hernandez C, Fu PF, Guo LJ Journal of Vacuum Science & Technology B, 26(6), 2426, 2008 |