검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of a large area scanning PECVD deposition system with small size RF electrodes Yin Y, Hang L, Proschek M, McKenzie DR, Bilek MMM, Allan S, Han J, Rubanov S, Lauder RDT, Godfrey RB Thin Solid Films, 515(1), 307, 2006 |
| 2 |
a-Si : H film deposition using same phase modulated scanning plasma method Maemura Y, Yamaguchi T, Yang SC, Fujiyama H Thin Solid Films, 374(2), 274, 2000 |