검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of silicon gas-to-particle conversion on SiCCVD in a cold-wall rotating-disc reactor Vorob'ev AN, Bogdanov MV, Komissarov AE, Karpov SY, Bord OV, Lovtsus AA, Makarov YN Materials Science Forum, 353-356, 107, 2001 |