검색결과 : 1건
No. | Article |
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Planar p-n diodes fabricated by MeV-energy and high-temperature selective implantation of aluminum to 4H-SiC Sugimoto H, Kinouchi S, Tarui Y, Imaizumi M, Ohtsuka K, Takami T, Ozeki T Materials Science Forum, 353-356, 731, 2001 |