검색결과 : 4건
No. | Article |
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1 |
Optimal design of advanced distillation configuration for enhanced energy efficiency of waste solvent recovery process in semiconductor industry Chaniago YD, Minh LQ, Khan MS, Koo KK, Bahadori A, Lee M Energy Conversion and Management, 102, 92, 2015 |
2 |
Power consumption benchmark for a semiconductor cleanroom facility system Hu SC, Wu JS, Chan DYL, Hsu RTC, Lee JCC Energy and Buildings, 40(9), 1765, 2008 |
3 |
Electroless processes for micro- and nanoelectronics Shacham-Diamand Y, Inberg A, Sverdlov Y, Bogush V, Croitoru N, Moscovich H, Freeman A Electrochimica Acta, 48(20-22), 2987, 2003 |
4 |
[기획특집-21세기 과학기술 경영] 반도체 산업의 기후변화협약 대응전략 조정국 Prospectives of Industrial Chemistry, 4(1), 28, 2001 |