검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Modeling and Simulations of Anisotropic Etching of Silicon in Alkaline Solutions with Experimental Verification Zhou ZF, Huang QA, Li WH Journal of the Electrochemical Society, 156(2), F29, 2009 |
| 2 |
Application of neural network to controlling three-dimensional electron-beam exposure distribution in resist Guo C, Lee SY, Lee SH, Kim BG, Cho HK Journal of Vacuum Science & Technology B, 27(6), 2572, 2009 |
| 3 |
Comparison of fast three-dimensional simulation and actinic inspection for extreme ultraviolet masks with buried defects and absorber features Clifford CH, Wiraatmadja S, Chan TT, Neureuther AR, Goldberg KA, Mochi I, Liang T Journal of Vacuum Science & Technology B, 27(6), 2888, 2009 |
| 4 |
Design specific variation in via/contact pattern transfer: Full chip analysis Choy JH, Sukharev V, Markosian A, Kteyan A, Granik Y, Bliznetsov V Journal of Vacuum Science & Technology B, 27(6), 2962, 2009 |