검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of substrate bias on AlN thin film preparation in shielded reactive vacuum are deposition Takikawa H, Kimura K, Miyano R, Sakakibara T, Bendavid A, Martin PJ, Matsumuro A, Tsutsumi K Thin Solid Films, 386(2), 276, 2001 |