검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition Takaki K, Kumagai O, Hasegawa R, Mukaigawa S, Fujiwara T, Kumagai M, Yukimura K Thin Solid Films, 506, 150, 2006 |
| No. | Article |
|---|---|
| 1 |
Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition Takaki K, Kumagai O, Hasegawa R, Mukaigawa S, Fujiwara T, Kumagai M, Yukimura K Thin Solid Films, 506, 150, 2006 |