검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Preparation and characterization of smooth and dense silicon nitride thin films Xu WT, Fujimoto T, Kojima I Thin Solid Films, 394(1-2), 109, 2001 |
| No. | Article |
|---|---|
| 1 |
Preparation and characterization of smooth and dense silicon nitride thin films Xu WT, Fujimoto T, Kojima I Thin Solid Films, 394(1-2), 109, 2001 |