검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A tracking ellipsometer of picometer sensitivity enabling 0.1 % sputtering-rate monitoring of EUV nanometer multilayer fabrication Yamamoto M, Hotta Y, Sato M Thin Solid Films, 433(1-2), 224, 2003 |
| No. | Article |
|---|---|
| 1 |
A tracking ellipsometer of picometer sensitivity enabling 0.1 % sputtering-rate monitoring of EUV nanometer multilayer fabrication Yamamoto M, Hotta Y, Sato M Thin Solid Films, 433(1-2), 224, 2003 |