화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 MOVPE strain layers - growth and application
Strupinski W, Dillner L, Sass J, Kosiel K, Stake J, Ingvarson M, Jakiela R
Journal of Crystal Growth, 221, 20, 2000
2 Epitaxy of Si/Si1-xGex heterostructures with very small roughness using a production-compatible ultrahigh vacuum chemical vapor deposition reactor
Lafontaine H, Mason BF, Rolfe SJ, Perovic DD, Bahierathan B
Journal of Vacuum Science & Technology B, 16(2), 599, 1998
3 Growth of Ternary Alloy Si1-X-Ygexcy by Rapid Thermal Chemical-Vapor-Deposition
Bodnar S, Regolini JL
Journal of Vacuum Science & Technology A, 13(5), 2336, 1995