검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
LP-CVD silicon-based film formation in submicrometer trenches in industrial equipment: Experiments and simulation Gris H, Caussat B, Cot D, Durand J, Couderc JP Advanced Materials, 14(17), A213, 2002 |
| No. | Article |
|---|---|
| 1 |
LP-CVD silicon-based film formation in submicrometer trenches in industrial equipment: Experiments and simulation Gris H, Caussat B, Cot D, Durand J, Couderc JP Advanced Materials, 14(17), A213, 2002 |