화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Lateral coupling and immunity to substrate effect in Omega FET devices
Ritzenthaler R, Cristoloveanu S, Faynot O, Jahan C, Kuriyama A, Brevard L, Deleonibus S
Solid-State Electronics, 50(4), 558, 2006
2 High rate (similar to 3 nm/s) deposition of dense silicon nitride films at low substrate temperatures (< 150 degrees C) using the expanding thermal plasma and substrate biasing
van Assche FJH, Kessels WMM, Vangheluwe R, Mischke WS, Evers M, Ab FJHVA
Thin Solid Films, 484(1-2), 46, 2005