검색결과 : 2건
No. | Article |
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1 |
Lateral coupling and immunity to substrate effect in Omega FET devices Ritzenthaler R, Cristoloveanu S, Faynot O, Jahan C, Kuriyama A, Brevard L, Deleonibus S Solid-State Electronics, 50(4), 558, 2006 |
2 |
High rate (similar to 3 nm/s) deposition of dense silicon nitride films at low substrate temperatures (< 150 degrees C) using the expanding thermal plasma and substrate biasing van Assche FJH, Kessels WMM, Vangheluwe R, Mischke WS, Evers M, Ab FJHVA Thin Solid Films, 484(1-2), 46, 2005 |