검색결과 : 1건
No. | Article |
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1 |
Effect of frequency and pulse width on the properties of ta : C films prepared by FCVA together with substrate pulse biasing Sheeja D, Tay BK, Yu LJ, Lau SR, Sze JY, Cheong CK Thin Solid Films, 420-421, 62, 2002 |
No. | Article |
---|---|
1 |
Effect of frequency and pulse width on the properties of ta : C films prepared by FCVA together with substrate pulse biasing Sheeja D, Tay BK, Yu LJ, Lau SR, Sze JY, Cheong CK Thin Solid Films, 420-421, 62, 2002 |